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Items | Unit | SG(SEMI GRADE) | ||||
---|---|---|---|---|---|---|
EL (SEMI G1) |
UP (SEMI G2) |
UPS (SEMI G3) |
UPSS (SEMI G4) |
UPSSS (SEMI G5) |
||
Content | % ≥ | 40-70 | 40-70 | 40-70 | 40-70 | 40-70 |
Fluosilicic acid | ≤ | 100ppm | 20000ppb | 10000ppb | 50ppb | 10ppb |
Cl | ≤ | 5ppm | 5000ppb | 500ppb | 50ppb | 3ppb |
NO3 | ≤ | 3ppm | 3000ppb | 300ppb | 10ppb | 3ppb |
PO4 | ≤ | 1ppm | 1000ppb | 100ppb | 10ppb | 6ppb |
SO4 | ≤ | 5ppm | 2000ppb | 200ppb | 20ppb | 10ppb |
SO4+SO3 | ≤ | - | 2500ppb | 400ppb | 30ppb | 10ppb |
Color | APHA≤ | 5 | 5 | 5 | 5 | 5 |
Particle (N0.2um) | pcs/ml≤ | 50 | 50 | 2 | ||
Particle (N0.3um) | pcs/ml≤ | 30 | 5 | |||
Particle (N0.5um) | pcs/ml≤ | 50 | 10 | 10(N0.05um) | ||
Li | ppb≤ | 20 | 50 | 1 | 0.1 | 0.02 |
B | ppb≤ | 50 | 50 | 1 | 0.1 | 0.02 |
Be | ppb≤ | 20 | 50 | 1 | 0.1 | 0.02 |
Na | ppb≤ | 100 | 50 | 1 | 0.1 | 0.02 |
Mg | ppb≤ | 50 | 50 | 1 | 0.1 | 0.02 |
Al | ppb≤ | 30 | 50 | 1 | 0.1 | 0.02 |
K | ppb≤ | 40 | 50 | 1 | 0.1 | 0.02 |
Ca | ppb≤ | 50 | 50 | 1 | 0.1 | 0.02 |
Ti | ppb≤ | 10 | 50 | 1 | 0.1 | 0.02 |
Cr | ppb≤ | 10 | 50 | 1 | 0.1 | 0.02 |
Mn | ppb≤ | 50 | 50 | 1 | 0.1 | 0.02 |
Fe | ppb≤ | 100 | 50 | 1 | 0.1 | 0.02 |
Co | ppb≤ | 50 | 50 | 1 | 0.1 | 0.02 |
Ni | ppb≤ | 50 | 50 | 1 | 0.1 | 0.02 |
Cu | ppb≤ | 10 | 50 | 1 | 0.1 | 0.02 |
Zn | ppb≤ | 50 | 50 | 1 | 0.1 | 0.02 |
Ga | ppb≤ | 50 | 50 | 1 | 0.1 | 0.02 |
As | ppb≤ | 100 | 50 | 1 | 0.1 | 0.02 |
Mo | ppb≤ | 100 | 50 | 1 | 0.1 | 0.02 |
Ag | ppb≤ | 50 | 50 | 1 | 0.1 | 0.02 |
Cd | ppb≤ | 50 | 50 | 1 | 0.1 | 0.02 |
Sn | ppb≤ | 50 | 50 | 1 | 0.1 | 0.02 |
Ba | ppb≤ | 50 | 50 | 1 | 0.1 | 0.02 |
Au | ppb≤ | 50 | 50 | 1 | 0.1 | 0.02 |
Pt | ppb≤ | 50 | 50 | 1 | 0.1 | 0.02 |
Pb | ppb≤ | 50 | 50 | 1 | 0.1 | 0.02 |
Bi | ppb≤ | 50 | 50 | 1 | 0.1 | 0.02 |
Nb | ppb≤ | 50 | 50 | 1 | 0.1 | 0.02 |
Sr | ppb≤ | 50 | 50 | 1 | 0.1 | 0.02 |
Ti | ppb≤ | 50 | 50 | 1 | 0.1 | 0.02 |
Ge | ppb≤ | 50 | 50 | 1 | 0.1 | 0.02 |
Zr | ppb≤ | 50 | 50 | 1 | 0.1 | 0.02 |
V | ppb≤ | 10 | 50 | 1 | 0.1 | 0.02 |
Ta | ppb≤ | 50 | 50 | 1 | 0.1 | 0.02 |
Sb | ppb≤ | 50 | 50 | 1 | 0.1 | 0.02 |