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| Items | Unit | SG(SEMI GRADE) | ||||
|---|---|---|---|---|---|---|
| EL (SEMI G1) |
UP (SEMI G2) |
UPS (SEMI G3) |
UPSS (SEMI G4) |
UPSSS (SEMI G5) |
||
| Content | % ≥ | 40-70 | 40-70 | 40-70 | 40-70 | 40-70 |
| Fluosilicic acid | ≤ | 100ppm | 20000ppb | 10000ppb | 50ppb | 10ppb |
| Cl | ≤ | 5ppm | 5000ppb | 500ppb | 50ppb | 3ppb |
| NO3 | ≤ | 3ppm | 3000ppb | 300ppb | 10ppb | 3ppb |
| PO4 | ≤ | 1ppm | 1000ppb | 100ppb | 10ppb | 6ppb |
| SO4 | ≤ | 5ppm | 2000ppb | 200ppb | 20ppb | 10ppb |
| SO4+SO3 | ≤ | - | 2500ppb | 400ppb | 30ppb | 10ppb |
| Color | APHA≤ | 5 | 5 | 5 | 5 | 5 |
| Particle (N0.2um) | pcs/ml≤ | 50 | 50 | 2 | ||
| Particle (N0.3um) | pcs/ml≤ | 30 | 5 | |||
| Particle (N0.5um) | pcs/ml≤ | 50 | 10 | 10(N0.05um) | ||
| Li | ppb≤ | 20 | 50 | 1 | 0.1 | 0.02 |
| B | ppb≤ | 50 | 50 | 1 | 0.1 | 0.02 |
| Be | ppb≤ | 20 | 50 | 1 | 0.1 | 0.02 |
| Na | ppb≤ | 100 | 50 | 1 | 0.1 | 0.02 |
| Mg | ppb≤ | 50 | 50 | 1 | 0.1 | 0.02 |
| Al | ppb≤ | 30 | 50 | 1 | 0.1 | 0.02 |
| K | ppb≤ | 40 | 50 | 1 | 0.1 | 0.02 |
| Ca | ppb≤ | 50 | 50 | 1 | 0.1 | 0.02 |
| Ti | ppb≤ | 10 | 50 | 1 | 0.1 | 0.02 |
| Cr | ppb≤ | 10 | 50 | 1 | 0.1 | 0.02 |
| Mn | ppb≤ | 50 | 50 | 1 | 0.1 | 0.02 |
| Fe | ppb≤ | 100 | 50 | 1 | 0.1 | 0.02 |
| Co | ppb≤ | 50 | 50 | 1 | 0.1 | 0.02 |
| Ni | ppb≤ | 50 | 50 | 1 | 0.1 | 0.02 |
| Cu | ppb≤ | 10 | 50 | 1 | 0.1 | 0.02 |
| Zn | ppb≤ | 50 | 50 | 1 | 0.1 | 0.02 |
| Ga | ppb≤ | 50 | 50 | 1 | 0.1 | 0.02 |
| As | ppb≤ | 100 | 50 | 1 | 0.1 | 0.02 |
| Mo | ppb≤ | 100 | 50 | 1 | 0.1 | 0.02 |
| Ag | ppb≤ | 50 | 50 | 1 | 0.1 | 0.02 |
| Cd | ppb≤ | 50 | 50 | 1 | 0.1 | 0.02 |
| Sn | ppb≤ | 50 | 50 | 1 | 0.1 | 0.02 |
| Ba | ppb≤ | 50 | 50 | 1 | 0.1 | 0.02 |
| Au | ppb≤ | 50 | 50 | 1 | 0.1 | 0.02 |
| Pt | ppb≤ | 50 | 50 | 1 | 0.1 | 0.02 |
| Pb | ppb≤ | 50 | 50 | 1 | 0.1 | 0.02 |
| Bi | ppb≤ | 50 | 50 | 1 | 0.1 | 0.02 |
| Nb | ppb≤ | 50 | 50 | 1 | 0.1 | 0.02 |
| Sr | ppb≤ | 50 | 50 | 1 | 0.1 | 0.02 |
| Ti | ppb≤ | 50 | 50 | 1 | 0.1 | 0.02 |
| Ge | ppb≤ | 50 | 50 | 1 | 0.1 | 0.02 |
| Zr | ppb≤ | 50 | 50 | 1 | 0.1 | 0.02 |
| V | ppb≤ | 10 | 50 | 1 | 0.1 | 0.02 |
| Ta | ppb≤ | 50 | 50 | 1 | 0.1 | 0.02 |
| Sb | ppb≤ | 50 | 50 | 1 | 0.1 | 0.02 |
